Investigations of Technical Problems in Gallium Arsenide
Abstract
Various technological problems in the development of GaAs microwave devices are covered in this report. The work reported here includes: epitaxial growth of ultra-thin and high-resistivity films, study of the relationship between device performance and material parameters using IMPATT diodes, annealing study of n-n(+) interfaces to improve their electrical properties, growth of semi-insulating substrates and characterization techniques, and study of ion implantation as a tool for microwave device fabrication.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 05, 1975
- Accession Number
- ADA011708
Entities
People
- Bryant M. Welch
- Cheng P. Wen
- Fred H. Eisen
- Ricardo R. Zucca