Silicon Planar n-p-nn+ Microwave Transistors Obtained by the Method of Ion Implantation,
Abstract
The production with ion beams of devices based on two and more junctions, in particular, bipolar transistors, is discussed. Ion implantation in combination with planar technology was used to develop n-p-nn+ transistors on silicon. It was possible to produce microwave silicon transistors with parameters close to those of the best models produced by the diffusion method.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 21, 1975
- Accession Number
- ADA014529
Entities
People
- B. I. Shchelchkov
- F. A. Shchigol
- K. B. Levitskii
- V. G. Naumenko
- V. M. Gusev
Organizations
- United States Army Foreign Science and Technology Center