SEM Investigation of IC Defects.

Abstract

An investigation of integrated circuit (IC) defects was conducted using the scanning electron microscope (SEM) at the U.S. Air Force Academy. The study included two main areas of interest: thermal effects on Au-Al intermetallic formation and radiation damage to thermocompression bonds.

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1975
Accession Number
ADA014803

Entities

People

  • Jerome R. Clifford

Organizations

  • United States Air Force Academy

Tags

DTIC Thesaurus Topics

  • Air Force
  • Electron Microscopes
  • Integrated Circuits
  • Microscopes
  • Radiation
  • Scanning Electron Microscopes
  • United States Air Force Academy

Fields of Study

  • Engineering

Readers

  • Integrated Circuit Design and Technology.
  • Technical Research and Report Writing.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics