Investigation of Technological Problems in GaAs
Abstract
Various technological problems in the development of GaAs microwave devices are covered in this report. The work reported here includes epitaxial growth of high-resistivity and multiple ultra-thin films, study of the relationship between device performance and material parameters using FETs and p-n junctions, study of noise and impact ionization coefficients in IMPATT structures under high electrical field, preparation of high-quality oxide films for surface passivation, growth of semi-insulating substrates, and characterization techniques and study of ion implantation as a tool for microwave device fabrication. The activities and the progress made during the six-month period are described in separate sections.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 25, 1975
- Accession Number
- ADA018090
Entities
People
- Anthony A. Immorlica
- Burt W. Ludington
- Fred H. Eisen
- John A. Higgins
- Reidar L. Kuvas