The Atom Probe Field Ion Microscope: Fundamental Principles of Operation.
Abstract
The ability of the Atom Probe to characterize the chemical composition of a surface with atomic resolution has been investigated. The experimental techniques necessary for quantitative surface studies are presented.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1975
- Accession Number
- ADA019424
Entities
People
- Robert Sloane Chambers
Organizations
- University of Illinois Urbana–Champaign