Noncrystalline Semiconductors: Electrical and Thermal Processes.
Abstract
Unstable switching was observed in numerous oxide and chalcogenide thin films. Stable switching, when observed, is due to a localized temperature rise in a micron-sized location of the film. Unstable switching is probably due to such local heating which results in local destruction of the film. The electrical and optical characteristics of undoped and doped SnO2, Co3O4, Fe2O3, TiO2, and VO(x)H(y) are reported. A technique for the low temperature pyrolitic deposition of oxide thin films was developed. The ability of V2O5, TiO2, Mn3O4, ZnO, and Cr2O3 thin films to sense changes in oxygen partial pressure was established.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 20, 1975
- Accession Number
- ADA020138
Entities
People
- Lyle H. Slack
Organizations
- Virginia Tech