Investigation of Defects and Impurities in Silicon-on-Sapphire,
Abstract
This report covers the first six months work on a program to investigate the effects of defects and impurities in sapphire substrates and SOS material. The work to date has been directed to identifying the types and quantities of defects and impurities in the samples of material provided by selected vendors. Experiments utilizing chemical surface etch techniques and x-ray topography were performed to identify structural defects in the sapphire substrate material. An Ion Microprobe Mass Analyzer was used to make a detailed elemental analysis of the SOS materials identifying the type and concentrations of impurities present in various samples. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1975
- Accession Number
- ADA021905
Entities
People
- John L. Peel
- Michael D. Barry