Photolithographic Techniques for Surface Acoustic Wave (SAW) Devices.
Abstract
The object of the program is the establishment of a production capability for surface acoustic wave devices of varied design and material for the purpose of meeting estimated military needs for a period of two years after the completion of the contract and to establish a base and plans which may be used to meet expanded requirements. The primary requirement is the pilot line production of devices that are reliable, reproducible, and low cost. The first phase of this program requires the design, fabrication, testing and shipment of a total of 60 prototype bandpass, tapped delay line and pulse compression SAW filters on both lithium niobate and ST-quartz. This report describes the extent of which this requirement has been met. Implementation of new laboratory equipment and facilities during the last quarter will resolve the major yield problems encountered during the First Engineering Phase. The completion of the second Engineering Phase will result in a finalization of the electrical specification.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1976
- Accession Number
- ADA022607
Entities
People
- A. R. Janus
- G. W. Judd
- T. W. Bristol
- W. R. Smith Jr
Organizations
- Hughes Aircraft Company