Control of Microcircuit Contamination. A Microsensor for Moisture Measurement.
Abstract
An anodized aluminum microsensor was developed for in-package monitoring of moisture in microcircuit package atmospheres. Sensors were characterized with respect to accuracy, reproducibility and operational limitations. Investigations included package self-generated contamination, sensor temperature cycling, stability studies, and comparison with mass spectrometry. Compatibility with semiconductor package design is discussed. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1976
- Accession Number
- ADA022974
Entities
People
- Vincent T. Cordasco
Organizations
- Texas Instruments