An Evaluation of Silicon on Sapphire Technology.
Abstract
Silicon on sapphire is a recent microelectronic circuit technology originally devised to eliminate the drawbacks of conventional junction isolation. It has since developed into a high performance MOS-type integrated circuit family. In this report a description of this logic family is given, including such topics as manufacturing processes, device physics, and performance of commercial circuits. The report concludes with an overall evaluation of this technology. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1976
- Accession Number
- ADA024907
Entities
People
- Henry Domingos
- Richard A. Anderson
Organizations
- Rome Laboratory