An Evaluation of Silicon on Sapphire Technology.

Abstract

Silicon on sapphire is a recent microelectronic circuit technology originally devised to eliminate the drawbacks of conventional junction isolation. It has since developed into a high performance MOS-type integrated circuit family. In this report a description of this logic family is given, including such topics as manufacturing processes, device physics, and performance of commercial circuits. The report concludes with an overall evaluation of this technology. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1976
Accession Number
ADA024907

Entities

People

  • Henry Domingos
  • Richard A. Anderson

Organizations

  • Rome Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Circuits
  • Integrated Circuits
  • Manufacturing
  • Sapphire
  • Semiconductor Manufacturing
  • Test And Evaluation

Readers

  • Integrated Circuit Design and Technology.
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene