Correlations of the 4.77 eV-4.28 eV Luminescence Band in Silicon Dioxide with the Oxygen Vacancy.

Abstract

A luminescence band observed at 4.77 eV (260 nm) in crystalline and at 4.28 eV (290 nm) in amorphous silicon dioxide has been found to correlate with optical and spin resonance measurements of oxygen vacancy concentrations in a series of irradiated samples. The 4.28 eV (290 nm) band has also been observed in the silicon dioxide layer of metal-oxide semiconductor (MOS) devices. The intensity of the bands can be increased by chemical reduction in carbon monoxide vapor or decreased by heating in oxygen or water vapor. The 4.28 eV (290 nm) luminescence intensity in the MOS samples also seems to be related to the trapped positive charge in the silicon dioxide. These facts all support a model for the liminescence center as being the oxygen vacancy. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jul 15, 1976
Accession Number
ADA027296

Entities

People

  • Colin E. Jones
  • David Embree

Organizations

  • Lehigh University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Carbon Monoxide
  • Compound Semiconductors
  • Dielectric Gases
  • Dioxides
  • Intensity
  • Luminescence
  • Metal Oxide Semiconductors
  • Metal Oxides
  • Oxides
  • Oxygen
  • Resonance
  • Semiconductors
  • Silicon
  • Silicon Dioxide
  • Spin Resonance
  • Water Vapor

Fields of Study

  • Materials science

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Materials Science and Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene