An Investigation of the Possible Application of Laser Trimming to Acoustical Transducers.
Abstract
An experimental investigation has been made of the possibility of using a laser to remove shorts and to trim lengths of high frequency interdigital transducers. Such a laser is required to have the capability of removing pieces of the metallic electrodes in increments of 1 sq micron or less. The experiment was performed on a 1000 A thick aluminum layer on top of a 300 A thick chromium layer on a quartz substrate which is a typical coating used for making interdigital transducers. Using a doubled Nd:YAG laser (wavelength 0.532 micron) with a pulse of about 100 nsec it was found that holes of area 1 sq micro could be punched with a pulse energy of about 1 microjoule. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1976
- Accession Number
- ADA030602
Entities
People
- A. Hordvik
Organizations
- Rome Laboratory