Electron Beam Fabrication of Surface Acoustic Wave Transducers.

Abstract

Techniques were developed to utilize an electron beam system to fabricate surface acoustic wave transducers. Transducers were fabricated and the electron exposure process was explored. Electron resist techniques were developed and successfully used. System programming was developed and advanced programming concepts were initiated. Procedures were developed to cover a range of geometrical configurations.

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1976
Accession Number
ADA031154

Entities

People

  • John A. Doherty

Tags

DTIC Thesaurus Topics

  • Acoustic Waves
  • Computer Programming
  • Electron Beams
  • Electrons
  • Fabrication
  • Piezoelectric Transducers
  • Surface Acoustic Waves
  • Transducers
  • Waves

Fields of Study

  • Physics

Readers

  • Nanofabrication and Microfabrication.
  • Plasma Physics / Magnetohydrodynamics
  • Software Engineering

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems