Radiation and Charge Injection in Al2O3 using New Techniques.
Abstract
Radiation-induced currents in pyrolytic Al2O3 films have been measured using strongly absorbed vacuum UV radiation. These currents show a behavior similar to that observed in SiO2 films; namely, there is a photocurrent component and a dark-current component which result after the trapping of holes in the oxide enhances tunnel injection of electrons from the silicon electrode. The radiation-induced electron injection is observed with smaller applied fields because of the trap-assisted tunneling mechanism known to be active in Al2O3. Interpretation of the results is complicated by the presence of both electron and hole traps. Nevertheless, two limiting models are proposed to provide a qualitative explanation. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 17, 1975
- Accession Number
- ADA031476
Entities
People
- Richard J. Powell
Organizations
- RCA Corporation