Defect Structure in GaAs.

Abstract

A unified computer program is presented, which is useful for the generation of indexed Kossel, pseudo-Kossel, Kikuchi, and channeling maps. The application of Impact Sound Stressing, a novel technique to introduce damage into wafer surfaces, is discussed for GaAs. Equipment and operational parameters are given. Impact Sound Stress induced damage in GaAs surfaces is characterized by light optical and scanning electron microscopy. (Author)

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1976
Accession Number
ADA032697

Entities

People

  • Guenter H. Schwuttke

Organizations

  • International Business Machines Corporation (Armonk, NY)

Tags

Communities of Interest

  • Air Platforms
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Computer Programs
  • Electron Beams
  • Electron Microscopes
  • Electron Microscopy
  • Films
  • Frequency
  • Gallium Arsenides
  • Geometry
  • Materials
  • Measurement
  • Microscopes
  • Microscopy
  • Resonant Frequency
  • Scanning Electron Microscopes
  • Scanning Electron Microscopy
  • Two Dimensional
  • X Rays

Fields of Study

  • Materials science

Readers

  • Structural Health Monitoring of Composite Structures.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems