Development of Large Area Multi-Layer Liquid Phase Epitaxy for Large Optical Cavity Laser Structures.
Abstract
The development of a liquid phase epitaxial process capable of yielding GaAlAs-GaAs multiple layer structures from which efficient lasers can be fabricated is discussed. The furnace facility is described in detail and the development of the LPE process is described. The application of various LPE processes to the growth of both large optical cavity and symmetrical optical cavity lasers is presented. Data is shown which depicts performance characteristics and emission patterns for the resultant devices. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1974
- Accession Number
- ADA034078
Entities
People
- Robert B. Gill