MNOS BORAM Manufacturing Methods and Technology Project.

Abstract

A manufacturing methods project has been initiated to establish a pilot production line for metal nitride oxide semiconductors (MNOS) block oriented random access memory (BORAM) multichip hybrid circuits. The first phase of activity is concerned with definition and establishment of the required production capability. This report describes the chip fabrication sequence, and outlines some experimental investigations. Program status and plans for the next quarter are reviewed. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1976
Accession Number
ADA037444

Entities

People

  • J. E. Brewer
  • L. A. Epstein
  • P. C. Smith
  • T. G. O'donnell

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Circuits
  • Computers
  • Detectors
  • Electrical Engineering
  • Electronics
  • Electronics Industry
  • Electronics Laboratories
  • Engineering
  • Fabrication
  • Hybrid Circuits
  • Manufacturing
  • Materials
  • Metal Nitride Oxide Semiconductors
  • Modules (Electronics)
  • Semiconductors
  • Shift Registers

Readers

  • Integrated Circuit Design and Technology.
  • Software Engineering

Technology Areas

  • Microelectronics