MNOS BORAM Manufacturing Methods and Technology Project.
Abstract
A manufacturing methods project has been initiated to establish a pilot production line for metal nitride oxide semiconductors (MNOS) block oriented random access memory (BORAM) multichip hybrid circuits. During the past quarter the hybrid circuit configuration was finalized, electrical test procedures were defined, and a new low cost MNOS die was fabricated. In addition process studies were continued, and the results of Auger analysis were summarized. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1976
- Accession Number
- ADA040400
Entities
People
- J. E. Brewer
- L. A. Epstein
- P. C. Smith
- T. G. O'donnell