Computer Simulation of the Angular Dispersion of Sputtered Copper Isotopes and a Possible 'Liquid Splash' Effect.
Abstract
The NPS computer simulation model was modified to study the angular dispersion and ring of sputtering sites formation of sputtered copper isotopes. The sputtering ratio as a function of the ion mass and the microcrystallite size needed to contain low-energy envents were also investigated. A shift in the ejection angles of sputtered Cu (63) isotopes toward the surface normal is observed. When the 'primary knock-on atom' was a light isotope, all of the sputtered atoms were ejected more nearly normal to the surface. The predominance of sputtered atoms in the <100> and <101> directions from the impact atom indicated an ease of momentum transfer in these directions. Results obtained from studies based upon a grid of impact points compares very favorably with the results obtained when randomly selected impact points were used. The rings of sputtered atoms present a 'Liquid Splash' effect. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1977
- Accession Number
- ADA042060
Entities
People
- Patrick Wayne Kelly Sr
Organizations
- Naval Postgraduate School