Kinetic Theory Description of Electron Stimulated Desorption.

Abstract

A first principles kinetic theory is developed, applicable to angular dependent emission in Electron Stimulated Desorption. Expressions for the ionic and neutral atom ESD cross sections are formulated and applied in a model calculation of 0+ emission from W(111). Strong focussing of the outgoing ions was found, with the use of a model ion-solid potential in which the substrate was free of excitation. Off-axis spot groups were simulated. The peak ion energies obtained with this model are, however, small compared to experimental energies for the high coverage case. The need to introduce substrate excitations to describe this case is discussed. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jun 30, 1977
Accession Number
ADA042069

Entities

People

  • Narkis Tzoar
  • Richard Janow

Organizations

  • City College of New York

Tags

Communities of Interest

  • Energy and Power Technologies
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Adsorption
  • Atoms
  • Chemisorption
  • Crystal Structure
  • Desorption
  • Electron Density
  • Electron Flux
  • Electrons
  • Equations
  • Ground State
  • Kinetic Energy
  • Kinetic Theory
  • Lepidoptera
  • New York
  • Simulations
  • Sorption
  • Trajectories

Fields of Study

  • Physics

Readers

  • Optical Physics and Photonics.
  • Plasma Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics