Studies of the Factors Affecting the Analysis of Thin Films and Surfaces Using Auger Electron Spectroscopy.

Abstract

This report describes the results of a research program undertaken to study the factors affecting the analysis of thin films and surfaces using Auger electron spectroscopy. Problems in interpreting Auger data both qualitatively and quantitatively due to overlap of spectral lines, chemical shifts in spectra, changes in spectral line shape, electron beam interactions and sample charging have been investigated and methods to overcome them have been developed. Problems that arise in depth profiling solids by inert gas ion bombardment have also been studied and techniques to improve the reliability of such measurements have also been developed. (Author)

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1977
Accession Number
ADA042192

Entities

People

  • J. T. Grant

Organizations

  • Universal Energy Systems

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Electron Emission
  • Electron Energy
  • Electron Spectroscopy
  • Electronics Industry
  • Electrons
  • Materials
  • Materials Laboratories
  • Measurement
  • Polyethylenes
  • Spectra
  • Spectral Lines
  • Spectroscopy
  • Thin Films
  • Transition Metals
  • X Rays

Fields of Study

  • Physics

Readers

  • Spectroscopy.
  • Theoretical Analysis.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene