Calibration of Graticules to High Accuracy.
Abstract
A technique for calibrating graticules (or stage micrometers) to high accuracy (+ or - 0.1 micrometers) is described. The lines were sensed photo-electrically and the distance between lines was measured with a laser interferometer. The accuracy is limited mainly by the quality of the graticule lines but for a graticule with long well-defined lines the uncertainty of measurement was 0.04 micrometers. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1977
- Accession Number
- ADA042566
Entities
People
- D. B. Prowse
Organizations
- Defence Science and Technology Group