Photovoltage Characterization of MOS Capacitors.
Abstract
Surface photovoltage, capacitance and conductance measurements have been made on various metal-oxide-semi-conductor (MOS) capacitors fabricated on p-type Si wafers. Curves of photovoltage plotted against dc sample bias are found to exhibit structure arising from surface state effects which correlates well with that observed in the C-V/G-V curves. In the region near the middle of the Si bandgap the surface state density can be reduced by about an order of magnitude by annealing. An equivalent circuit approach is used to relate the photovoltage to the electrical parameters. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 1977
- Accession Number
- ADA043517
Entities
People
- F. Rothwarf
- J. J. Winter
- R. L. Streever
Organizations
- United States Army Communications-Electronics Command