Preparation of Variable Thickness Microbridges Using Electron Beam Lithography and Ion Etching.

Abstract

Techniques have been developed for the fabrication of variable thickness constriction (VTC) microbridges. The bridges produced by these techniques display the superior characteristics found by others in VTC bridges made by scratching techniques. The EBL techniques described have the advantage of being easily applicable to fabrication of large arrays of nearly identical bridges. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jun 08, 1977
Accession Number
ADA043668

Entities

People

  • G. J. Dolan
  • J. E. Lukens
  • R. D. Sandell

Organizations

  • Stony Brook University

Tags

DTIC Thesaurus Topics

  • Constrictions
  • Electron Beam Lithography
  • Electron Beams
  • Electrons
  • Fabrication
  • Lithography
  • Lithography (Fabrication)
  • Plastic Explosives
  • Thickness
  • Three Dimensional

Fields of Study

  • Engineering

Readers

  • Fluid Dynamics.
  • Nanofabrication and Microfabrication.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene