Electron Resists.

Abstract

This report is a survey of the work on electron-beam resist materials as reported in the open literature. The period surveyed does not go beyond 1 January 1977. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 1977
Accession Number
ADA044282

Entities

People

  • H. F. Blazek
  • J. Applebaum
  • P. F. Ordung

Organizations

  • Naval Air Weapons Station China Lake

Tags

Communities of Interest

  • Energy and Power Technologies
  • Weapons Technologies

DTIC Thesaurus Topics

  • Alkenes
  • Chemistry
  • Coatings
  • Electron Beams
  • Electron Scattering
  • Electrons
  • Films
  • High Resolution
  • Materials
  • Molecular Weight
  • New York
  • Organic Coatings
  • Plastics
  • Polymer Chemistry
  • Polymeric Films
  • Polymers
  • Radiation

Fields of Study

  • Physics

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene