Electron Beam Microfabrication Systems.

Abstract

This report is a survey of electron beam microfabrication systems reported in the open literature as of 1 January 1977. Two categories of systems are identified based upon either beam scanning or beam projection as the image forming mechanism. In general, beam scanning systems provide higher resolution and accuracy while beam projection systems are used to obtain a larger throughput. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 1977
Accession Number
ADA044340

Entities

People

  • H. F. Blazek
  • J. Applebaum
  • P. F. Ordung

Organizations

  • Naval Air Weapons Station China Lake

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Weapons Technologies

DTIC Thesaurus Topics

  • Accuracy
  • Central Processing Units
  • Computers
  • Data Acquisition
  • Deflection
  • Detectors
  • Diameters
  • Electron Beams
  • Electronics
  • Electrons
  • Emission
  • Energy Systems
  • Field Emission
  • Generators
  • Laser Beams
  • Magnetic Fields
  • Solid State Electronics

Fields of Study

  • Physics

Readers

  • Business Analytics
  • Optical Physics and Photonics.

Technology Areas

  • Directed Energy
  • Microelectronics