Electronic Beam Fabrication of Surface Acoustic Wave Transducers.

Abstract

A Lanthanum Hexaboride Gun was added to the electron beam fabrication system. Systems programming was advanced. The elements of a cooperative exposure effects model were developed and instituted in the programming. Exposure techniques were developed to optimize resolution and edge definition. (Author)

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1977
Accession Number
ADA045592

Entities

People

  • John A. Doherty

Tags

Communities of Interest

  • Energy and Power Technologies
  • Human Systems
  • Materials and Manufacturing Processes
  • Sensors
  • Space

DTIC Thesaurus Topics

  • Acoustic Waves
  • Air Force
  • Computer Programming
  • Control Systems
  • Dead Time
  • Decoding
  • Dwell Time
  • Electron Beams
  • Electrons
  • Fabrication
  • Frequency
  • Generators
  • Operating Systems
  • Power Supplies
  • Surface Acoustic Waves
  • Transducers
  • Voltage

Fields of Study

  • Physics

Readers

  • Operations Research
  • Pulsed Power and Plasma Physics.
  • Software Engineering

Technology Areas

  • Directed Energy
  • Microelectronics