Gallium Arsenide Vertical Channel Insulated Gate Field-Effect Transistor.
Abstract
The technologies necessary to fabricate a power, microwave frequency, vertical channel, gallium arsenide insulated gate field-effect transistor have been further developed. Planar devices that show FET action have been fabricated. The etching technology for a V-groove version of the vertical channel device has been explored. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 1977
- Accession Number
- ADA047108
Entities
People
- D. A. Tremere
- D. L. Barrett
- M. C. Driver