Small Scale Discharge Studies
Abstract
In the report we describe the modelling of an e-beam controlled discharge operated in gas mixtures containing mainly argon with approximately 10% krypton and a few tenths of a percent fluoride. The discharge physics is dominated by electron impact ionization and excitation of the rare gas metastables. The ionization of the metastables impacts the discharge stability directly while their excitation strongly effects the efficiency of producing KrF*. Two step ionization is dominant and we have developed a stability criterion for these discharges. Predictions of the model are compared with experimental results.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 29, 1976
- Accession Number
- ADA047219
Entities
People
- J. A. Mangano
- J. H. Jacob