Cantilever Accelerometer.
Abstract
Four accelerometer models were designed, manufactured and evaluated during the term of the contract. These were built using single crystalline silicon and integrated circuit fabrication techniques. The basic physical structure used on all accelerometer models was the 'H' geometry. The difference between the models was the topographical locations of the piezoresistor bridge, and electronic components which were adjusted in order to obtain optimized accelerometer performance. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1977
- Accession Number
- ADA048045
Entities
People
- Mark L. Stephens
- Warren C. Rosvold