MM and T Program for the Establishment of Production Techniques for High Power Bulk Semiconductor Limiters.
Abstract
X-band bulk limiters have been fabricated using high resistivity silicon rho = 15,000 ohm-cm. Bulk limiters from both the sources exhibited power handling capability of 15-25 kW but a cracking problem was experienced with one source of wafers. Batch process and ball-bonding processes have been introduced to manufacture the bulk limiters at a low cost with good yield. Various parameters are being optimized to achieve both bandwidth and RF power goals of the contract.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1977
- Accession Number
- ADA049129
Entities
People
- Paul Bakeman
- Yoginder Anand
Organizations
- M/A-COM Technology Solutions