High-Reliability, Low-Cost Integrated Circuits.
Abstract
Wafer fabrication is nearly completed. COS/MOS circuits have been successfully fabricated utilizing sputter etch technology for platinum definition. Trimetallization technology with silicon nitride overcoat passivation, copper beam-tape automated assembly, and silicone molding compound has proven to be the best system for fabrication of high reliability low cost integrated circuits. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 03, 1977
- Accession Number
- ADA049763