Variations in Optical Reflectivity of Sputter Deposited Metal and Semimetal Films

Abstract

The surface structure of vacuum sputter deposited metal and semimetal films can be varied by changing the substrate bias potential and the total time of deposition. The corresponding change in the optical reflectivity can be related to enhanced scattering and absorption effects. Reflectivity measurements over the infrared range from 1 to 7 microns are presented and discussed for titanium, antimony, bismuth, and copper films. Results for the metal films, copper and titanium, are in agreement with those obtained by Bennett for aluminum films. The results for antimony and bismuth indicate the influence of enhanced absorption.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1977
Accession Number
ADA050681

Entities

People

  • C. W. Cutsinger
  • G. H. Turner
  • H. F. Blazek

Organizations

  • Naval Air Weapons Station China Lake

Tags

Communities of Interest

  • Air Platforms
  • Space
  • Weapons Technologies

DTIC Thesaurus Topics

  • Air Force
  • Air Force Facilities
  • Corporations
  • Electric Fields
  • Electronics
  • Electrons
  • Engineering
  • Films
  • Free Electrons
  • Lasers
  • Materials
  • Measurement
  • Metal Films
  • Metals
  • Military Research
  • Scattering
  • Surface Plasmons

Fields of Study

  • Materials science
  • Physics

Readers

  • Metallurgy
  • Semiconductor Device Technology
  • Spectroscopy.