Distribution of Flatband Voltages in Laterally Nonuniform Mis Capacitors and Application to a Test for Nonuniformities

Abstract

The effect of a laterally nonuniform distribution of fixed charge in the insulator of an MIS capacitor can be characterized by a flatband-voltage distribution function. We present a simple, approximate C-V method for determining this distribution, and apply the result to a test for distinguishing between interface states and laterally nonuniform fixed charge. Examples are presented.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1977
Accession Number
ADA051167

Entities

People

  • Chuan‐Chieh Chang
  • Walter C. Johnson

Organizations

  • Princeton University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abnormalities
  • Capacitance
  • Capacitors
  • Computers
  • Delta Functions
  • Dielectrics
  • Distortion
  • Distribution Functions
  • Electrical Engineering
  • Electron Beams
  • Elements
  • Engineering
  • Frequency
  • New Jersey
  • Night Vision
  • Nonuniform
  • Step Functions

Fields of Study

  • Physics

Readers

  • Electromagnetic Wave Scattering and Antenna Radiation Engineering
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems