QA Procedures for Complex Microcircuits.
Abstract
The purpose of this study was to establish an alternate procedure in lieu of High Magnification preseal visual for complex microcircuits. In-line wafer process controls were developed which provide effective control of the wafer visual conditions. Changes to MIL-STD-883 have been recommended to implement this process control. The study approach was to: perform wafer mapping of visual defect locations; develop in-line wafer process controls from this data; perform preliminary testing with known visual defects on LSI chips to verify alternate test methods; and perform final verification testing on complex LSI wafer product processed in accordance with the recommended procedures. In addition, it was found that a package problem generated numerous bond failures which were not adequately detected by 10 temperature cycles. A change has been recommended to MIL-STD-883 to perform 100 cycles of temperature cycling. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1977
- Accession Number
- ADA052418
Entities
People
- John L. Wolcott
- Louis R. Paradiso
Organizations
- Harris Corporation