Profiling of GaAs Using a Distributed RC Structure.
Abstract
The objective of this research was to compare the results of an experiment using a distributed RC structure to evaluate both the impurity profile and mobility of ion-implanted layers in GaAs with the results of the differential Hall-effect technique for the same type of samples. The distributed RC structure experiments were to be performed at The University of New Mexico (UNM) and the differential Hall-effect experiments were to be performed at AFAL-DHR at WPAFB. The theory of the distributed RC technique is presented in the Appendix. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1978
- Accession Number
- ADA052597
Entities
People
- Roy A. Colclaser
Organizations
- University of New Mexico