Impurity and Defect Behavior in High-Purity Epitaxial GaAs
Abstract
This report summarizes research performed in an effort to obtain a better understanding of impurity and defect behavior in epitaxial GaAs. This work includes the identification of residual defects, the development of a model for impurity incorporation, and an examination of impurity gradient effects.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 31, 1977
- Accession Number
- ADA053116
Entities
People
- C. M. Wolfe
Organizations
- Washington University in St. Louis