Quartz Crystal Fabrication Facility.
Abstract
The specification objectives for a high production, in line, ultrahigh vacuum, precision crystal unit final processing system now being constructed are reviewed. Design features of the system including methods for ultraviolet cleaning, bakeout, plating and sealing of crystal units having ceramic flat pack enclosures in an oilfree, cryogenic vacuum system are outlined. Entrance and exit air lock chambers and transports provide means to maintain the critical process chambers at high vacuum continuously. Experimentation to develop and prove several process modules being incorporated into the final system is described and initial results reported. Emphasis is placed on simplicity of design, operational reliability, modular interchangeability, cleanliness, and future automation aspects. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1977
- Accession Number
- ADA053582
Entities
People
- J. M. Frank
- R. J. Ney
Organizations
- General Electric