Ceramic-to-Metal Seals for High Power Microwave Tubes.
Abstract
The objective of the program was the development of a material process capability for metal-to-ceramic sealing used in high-power cross-field amplifier (CFA) microwave tubes. The specific objective was to develop the ion plating process to deposit multilayered metallic coatings onto the highest purity available beryllium oxide (BeO) and aluminum nitride (A1N) substrate materials. A satisfactory copper/molybdenum-to-beryllia bond was achieved without the use of an active metal adhesion aid such as titanium. An ion plating technique was developed for depositing two-layer films such as molybdenum and copper onto BeO. Subsequent evaluation of this metal-to-ceramic combination indicated a bond strength of over 140.32 Mega Pascal.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1978
- Accession Number
- ADA057413
Entities
People
- Roy F. Wielonski
Organizations
- Battelle Memorial Institute