Computer Aided Engineering of Semiconductor Integrated Circuits.
Abstract
Economical procurement of small quantities of high performance custom integrated circuits for military systems is severely impeded by inadequate process, device and circuit models that handicap accurate computer-aided design at low cost. The salient objective of this program is to formulate physical models of fabrication processes, devices and circuits to allow total computer-aided design of custom large-scale integrated circuit subsystems to reduce development cycle time and cost. The basic areas under investigation are: (1) ion implantation and diffusion of dopants; (2) thermal oxidation; (3) chemical vapor deposition of silicon epitaxy; and (4) device simulation and statistical circuit modeling. This report discusses the results of the second year of the program. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1978
- Accession Number
- ADA059752
Entities
People
- J. D. Meindl
- James F. Gibbons
- Krishna C. Saraswat
- R. W. Dutton
- W. Tiller
Organizations
- Stanford University