Solid-Solid Reactions in Metal Films on Silicon.

Abstract

Investigations were conducted on solid-solid reactions in gold and aluminum thin films formed on Si substrates at deposition temperatures below the eutectic points. Additional research was also performed on the reactions between Al thin films and polycrystalline (CVD) Si. As-deposited and annealed structures were studied using correlated data from transmission electron microscopy/diffraction (TEM/TED), Auger electron spectroscopy (AES) profiling, and forward current-voltage (I-V) measurements.

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Document Details

Document Type
Technical Report
Publication Date
Sep 14, 1978
Accession Number
ADA060100

Entities

People

  • Jing Peng
  • T. J. Magee

Tags

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Crystal Structure
  • Crystals
  • Diffraction
  • Diffusion
  • Electron Diffraction
  • Electron Microscopy
  • Electron Spectroscopy
  • Electrons
  • Films
  • Measurement
  • Microscopy
  • Semiconductors
  • Spectroscopy
  • Thin Films
  • Transmission Electron Microscopy

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene