UHV Application of Spring Loaded Teflon Seals.
Abstract
Large, bakeable, rotatable ultra high vacuum seals capable of operation at ten to the minus 11th power torr are described. They employ doubly differentially pumped commercially available spring loaded Teflon seals. A static version is very convenient for quick access as it requires nearly negligible sealing force other than atmospheric force. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1978
- Accession Number
- ADA060112
Entities
People
- Charles A. Becker
- Daniel J. Auerbach
- James P. Cowin
- Lennard Wharton
Organizations
- University of Chicago