Research in High-Density Storage Using Electron Beam-Activated Machining Techniques.

Abstract

This program is devoted to the preparation and investigation of two novel kinds of electron-beam-addressable storage elements of submicron size and densely packed arrays of these elements; also to the construction of a large-capacity, high-speed, electron-beam-addressable, data-storage system utilizing regular arrays of these elements. One kind of element, called a micro-cap, consists of an isolated microcapacitor at the bottom of a hole in a metal/dielectric/metal film sandwich. The other kind, called a micro-ring, consists of an isolated metal film ring embedded concentrically with a hole in the dielectric of a multilayer metal/dielectric film sandwich.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1968
Accession Number
ADA062116

Entities

People

  • Donald R. Cone
  • Kendal T. Rogers
  • Louis N. Heynick

Organizations

  • SRI International

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Aluminum Oxides
  • Chemistry
  • Computer Programs
  • Computers
  • Data Storage Systems
  • Dielectric Films
  • Electron Beams
  • Electron Microscopes
  • Elements
  • Fabrication
  • Films
  • Materials
  • Materials Processing
  • Materials Science
  • Mathematical Analysis
  • Measurement
  • Metal Films

Fields of Study

  • Physics

Readers

  • Nanofabrication and Microfabrication.

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems