Acoustic Microscopic Study of Materials.
Abstract
This research program is based upon the study of the properties of electronic microstructures with acoustic microscopy. It has a further objective of improving the author's understanding of this emerging technology as a new form of imaging the detail in modern microcircuits. The scope of this area is ever increasing and new methods for analyzing features on this scale are important. The theory of the acoustic microscope and the resolving power of this instrument have both been advanced during the initial period of this program. The resolving power of his best instrument is now comparable to the optical microscope. He has been able to demonstrate a new form of the microscope' which is described by the term 'photoacoustic microscope and it holds the potential for revealing still more information on the detailed structure of microcircuits.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1978
- Accession Number
- ADA064562
Entities
People
- Calvin Quate
Organizations
- Stanford University