IC Fabrication Using Electron-Beam Technology.

Abstract

All of the required environmental and electrical tests of the first article 256-bit Bipolar RAM devices (50) were completed this quarter. These units passed all of the electrical measurements at 0 C, 25 C, and 70 C. However, the maximum operating speed of the units was about 20% slower than desired due to the electron resist being inadvertently removed during the contact oxide etch step. Fabrication of the pilot production units has begun and these units should pass all specifications including operating speed. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1979
Accession Number
ADA064770

Entities

People

  • Gilbert L. Varnell
  • Jack Reynolds
  • Shang-yi Chiang

Organizations

  • Texas Instruments

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms
  • Space
  • Weapons Technologies

DTIC Thesaurus Topics

  • Access Time
  • Electrical Measurement
  • Electron Beams
  • Electronics
  • Electronics Laboratories
  • Fabrication
  • Life Tests
  • Manufacturing
  • Materials
  • Measurement
  • Military Research
  • Production
  • Quality Control
  • Semiconductor Manufacturing
  • Static Tests
  • Test Equipment
  • Test Methods

Readers

  • Educational Psychology
  • Integrated Circuit Design and Technology.
  • Software Engineering

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems