Fabrication of Microbridge Josephson Junctions Using Electron Beam Lithography.

Document Details

Document Type
Technical Report
Publication Date
Nov 14, 1978
Accession Number
ADA067367

Entities

People

  • C. Varmazis
  • J. E. Lukens
  • R. D. Sandell

Organizations

  • Stony Brook University

Tags

DTIC Thesaurus Topics

  • Electron Beam Lithography
  • Electron Beams
  • Electrons
  • Fabrication
  • Josephson Junctions
  • Lithography
  • Lithography (Fabrication)
  • Reproduction (Copying)

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene