Interface Doping of MNOS Transistors.

Abstract

This Interim Technical Report describes the progress for the 1 April 1976 to March 1977 period of Phase I of the Interface Doping of MNOS program. Use of Cr, W, Pt, Ni, Pd and Ir as interface dopant in monolayer quantities between an oxide layer of Fowler-Nordheim tunneling thickness and 300-500A of Si3N4 gives MNOS memory retention of electrons of many centuries even at elevated temperatures, while retaining high write speed. Endurance is limited to 1000 write/erase cycles. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1977
Accession Number
ADA067857

Entities

People

  • C. A. Neugebauer
  • M. M. Barnicle

Organizations

  • General Electric

Tags

DTIC Thesaurus Topics

  • Acids
  • Ceramic Materials
  • Elements
  • Films
  • Flow Rate
  • Hydrogen
  • Measurement
  • Melting Point
  • Metal Oxides
  • Metals
  • Oxidation
  • Oxide Films
  • Oxides
  • Oxygen
  • Sputtering
  • Two Dimensional
  • Vacuum Deposition

Readers

  • Semiconductor Device Technology
  • Technical Research and Report Writing.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene