Use of Nuclearmicroanalysis. Part I. Proton Activation Studies of the Thermal Oxidation of Silicon.

Abstract

The mechanism of the thermal oxidation of silicon in 'dry' oxygen has been investigated using the direct observation of nuclear reactions. It has been found that the rate controlling process is the transport of molecular oxygen through the silica scale with exchange occurring between the permeating oxygen and the network oxygen. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1978
Accession Number
ADA069003

Entities

People

  • A. H. Heuer
  • A. R. Cooper
  • Leslie Dean Major Jr

Organizations

  • Case Western Reserve University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Alpha Particles
  • Alpha Spectra
  • Charged Particles
  • Chemical Reactions
  • Chemistry
  • Crystal Structure
  • Detectors
  • Exchange Reactions
  • High Temperature
  • Materials
  • Materials Laboratories
  • Measurement
  • Metal Oxides
  • Nuclear Reactions
  • Optical Materials
  • Oxidation
  • Plastic Explosives

Fields of Study

  • Materials science

Readers

  • Combustion science or combustion engineering.
  • Solar Physics