Use of Nuclearmicroanalysis. Part I. Proton Activation Studies of the Thermal Oxidation of Silicon.
Abstract
The mechanism of the thermal oxidation of silicon in 'dry' oxygen has been investigated using the direct observation of nuclear reactions. It has been found that the rate controlling process is the transport of molecular oxygen through the silica scale with exchange occurring between the permeating oxygen and the network oxygen. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 1978
- Accession Number
- ADA069003
Entities
People
- A. H. Heuer
- A. R. Cooper
- Leslie Dean Major Jr
Organizations
- Case Western Reserve University