The Study and Identification of Residual Donor Species in High Purity Semiconductors.
Abstract
A Fourier transform spectroscopy apparatus has been constructued. This apparatus uses photothermal ionization to probe the energy level structure of shallow impurities in semiconductors. The present form of the apparatus, and progress made in modifying it to increase its resolution are described in detail. An account of our immediate and possible furture applications of the apparatus is given. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1979
- Accession Number
- ADA071059
Entities
People
- Gregory E. Stillman
Organizations
- University of Illinois Urbana–Champaign