Acoustic Wave Measurements of Semiconductor Parameters.
Abstract
Various types of acoustic surface wave techniques for measuring the parameters ofa semiconductor are discussed in this paper. These include techniques to measure mobility, carrier density, surface state density, and trapping time in surface states. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1977
- Accession Number
- ADA071942
Entities
People
- Gordon S. Kino
Organizations
- Stanford University